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全自動(dòng)表面張力儀芯片制造技術(shù)中的應(yīng)用

更新時(shí)間：2025-10-22

點(diǎn)擊次數(shù)：1900

　　全自動(dòng)表面張力儀設(shè)定測(cè)量參數(shù)后可以準(zhǔn)確測(cè)量并顯示表面張力值。能夠獨(dú)立設(shè)定測(cè)量范圍、測(cè)試數(shù)據(jù)數(shù)目、測(cè)量的平均值，是研發(fā)的理想工具。是專(zhuān)門(mén)用于生產(chǎn)過(guò)程中的連續(xù)監(jiān)控模式。

　　全自動(dòng)表面張力儀作用于液體表面，使液體表面積縮小的力，稱(chēng)為液體表面張力。它產(chǎn)生的原因是液體跟氣體接觸的表面存在一個(gè)薄層，叫做表面層，表面層里的分子比液體內(nèi)部稀疏，分子間的距離比液體內(nèi)部大一些，分子間的相互作用表現(xiàn)為引力。就象你要把彈簧拉開(kāi)些，彈簧反而表現(xiàn)具有收縮的趨勢(shì)。

　　半導(dǎo)體晶圓制造工藝包括清洗、曝光、顯影、刻蝕、CMP（化學(xué)機(jī)械拋光）、切片等環(huán)節(jié)，需要用到各種特殊的液體，如顯影液，清洗液，拋光液等等，這些液體中表面活性劑的濃度對(duì)工藝質(zhì)量效果產(chǎn)生深刻的影響。

　　芯片制造技術(shù)的進(jìn)步驅(qū)動(dòng)半導(dǎo)體清洗技術(shù)快速發(fā)展。在單晶硅片制造中，光刻，刻蝕，沉積等工藝后均設(shè)置了清洗工藝，清洗工藝在芯片制造進(jìn)程中占比很大，隨著芯片技術(shù)節(jié)點(diǎn)不斷提升，對(duì)晶圓表面污染物的控制要求也越來(lái)越高。

　　清洗工藝的好壞直接影響下一道工序，甚至影響器件的成品率和可靠性，然而在清洗工藝過(guò)程中，工人往往疏于監(jiān)控清洗和漂洗工序中表面活性劑的濃度，表面活性劑經(jīng)常過(guò)量，而為了消除表面活性劑過(guò)量帶來(lái)的不利影響，又往往要費(fèi)時(shí)費(fèi)力地增加漂洗工序階段的成本。

　　而表面張力儀的作用就是通過(guò)測(cè)試，建立清洗槽液的表面張力值與表面活性劑濃度關(guān)系曲線(xiàn)，進(jìn)而實(shí)現(xiàn)通過(guò)監(jiān)控晶圓清洗工藝中表清洗劑表面張力的變化來(lái)調(diào)整清洗劑的添加量，從而優(yōu)化晶圓清洗工藝。

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